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On the impact of grown-in substrate defects and iron contamination on gate oxide integrity
Publication:
On the impact of grown-in substrate defects and iron contamination on gate oxide integrity
Date
1996
Proceedings Paper
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1587.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Kissinger, G.
;
Kenis, Karine
;
Depas, Michel
;
Gräf, D.
;
Lambert, U.
;
Wagner, Patrick
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1935
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1935
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations