Authors
Vanhellemont, Jan;
Kissinger, G.;
Gräf, D.;
Kenis, Karine;
Depas, Michel;
Mertens, Paul;
Lambert, U.;
Heyns, Marc;
Claeys, C.;
Richter, H.;
Wagner, Patrick
Conference
Proceedings 18th International Conference on Defects in Semiconductors - ICDS-18; July 23 -28, 1995; Sendai, Japan.
Title
Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Publication type
Proceedings paper
Embargo date
9999-12-31
