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Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Publication:
Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
Date
1995
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Kissinger, G.
;
Gräf, D.
;
Kenis, Karine
;
Depas, Michel
;
Mertens, Paul
;
Lambert, U.
;
Heyns, Marc
;
Claeys, C.
;
Richter, H.
;
Wagner, Patrick
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2022
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2022
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations