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On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides
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Authors
Groeseneken, Guido
;
Degraeve, Robin
;
De Blauwe, Jan
;
Roussel, Philippe
;
Depas, Michel
;
Maes, Herman
Conference
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title
On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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