Publication:

On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides

Date

1997
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Blauwe, Jan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorDepas, Michel
dc.contributor.authorMaes, Herman
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.accessioned2021-09-30T08:20:51Z
dc.date.available2021-09-30T08:20:51Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1903
dc.source.beginpage3
dc.source.conferenceSilicon Nitride and Silicon Dioxide Thin Insulating Films
dc.source.conferencedate4/05/1997
dc.source.conferencelocationMontréal Canada
dc.source.endpage19
dc.title

On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1872.pdf
Size:
679.11 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions