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On the nature of grown-in defects in silicon: dependence on pulling conditions and evolution during treatments
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Authors
Vanhellemont, Jan
;
Kissinger, G.
;
Senkader, S.
;
Gräf, D.
;
Kenis, Karine
;
Depas, Michel
;
Lambert, U.
;
Wagner, Patrick
Conference
Proceedings of the 4th International Symposium on High Purity Silicon
Title
On the nature of grown-in defects in silicon: dependence on pulling conditions and evolution during treatments
Publication type
Proceedings paper
Embargo date
9999-12-31
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