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Publication:

Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation

Date

1996

Proceedings Paper

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Files

1586.pdf 148.95 KB

Author(s)

Vanhellemont, Jan

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Statistics

1959 since deposited on 2021-09-29

Acq. date: 2026-07-27