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Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation
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1952 since deposited on 2021-09-29
4last month
1last week
Acq. date: 2026-01-10
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1952 since deposited on 2021-09-29
4last month
1last week
Acq. date: 2026-01-10
Citations