Authors

Groeseneken, Guido; Degraeve, Robin; Ogier, Jean-Luc; Bellens, Rudi; Roussel, Philippe; Depas, Michel; Maes, Herman

Conference

27th IEEE Semiconductor Interface Specialists Conference (SISC); December 5-7, 1996; San Diego, Calif., USA.

Title

New insights in the impact of the breakdown mechanisms on the statistics of intrinsic and extrinsic breakdown in thin oxides

Publication type

Oral presentation