Authors

Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, Patrick

Conference

Early Stages of Oxygen Precipitation in Silicon; NATO Advanced Research Workshop on Early Stages of Oxygen Precipitation in Sili

Title

On the impact of grown-in silicon oxide precipitate nuclei on silicon gate oxide integrity

Publication type

Proceedings paper

Embargo date

9999-12-31