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On the impact of grown-in silicon oxide precipitate nuclei on silicon gate oxide integrity
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On the impact of grown-in silicon oxide precipitate nuclei on silicon gate oxide integrity
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Date
1996
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Kissinger, G.
;
Kenis, Karine
;
Depas, Michel
;
Gräf, D.
;
Lambert, U.
;
Wagner, Patrick
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1984
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations
Metrics
Views
1984
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations