Publication:

Contact layer printing at 0.28k1 by means of double line exposure and negative tone development

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0009-0001-2424-1322
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3075-3479
cris.virtualsource.departmentb4f8c238-ae6a-4a36-b09f-6a93bec3afa5
cris.virtualsource.department2de2f471-f2b5-41d4-b237-dca99c2395be
cris.virtualsource.department8f5fd27d-55ef-418c-94c3-d9a8ce4a3e5c
cris.virtualsource.orcidb4f8c238-ae6a-4a36-b09f-6a93bec3afa5
cris.virtualsource.orcid2de2f471-f2b5-41d4-b237-dca99c2395be
cris.virtualsource.orcid8f5fd27d-55ef-418c-94c3-d9a8ce4a3e5c
dc.contributor.authorBekaert, Joost
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorReybrouck, Mario
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorReybrouck, Mario
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-17T06:16:26Z
dc.date.available2021-10-17T06:16:26Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13363
dc.source.conference5th International Symposium on Immersion Lithography Extensions
dc.source.conferencedate22/09/2008
dc.source.conferencelocationDen Haag Nederland
dc.title

Contact layer printing at 0.28k1 by means of double line exposure and negative tone development

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
16967.pdf
Size:
4.22 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions