Publication:
Arsenic and phosphorus co-implantation for deep-submicron CMOS gate and source/drain engineering
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1906 since deposited on 2021-10-14
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Acq. date: 2026-03-17
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Statistics
Views
1906 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-03-17
Citations