Publication:

Arsenic and phosphorus co-implantation for deep-submicron CMOS gate and source/drain engineering

Date

2001

Proceedings Paper

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Author(s)

Augendre, Emmanuel

;

De Keersgieter, An

;

Kubicek, Stefan

;

Redolfi, Augusto

;

Van Laer, Joris

;

Badenes, Gonçal

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1907 since deposited on 2021-10-14

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Acq. date: 2026-05-30