Publication:
Arsenic and phosphorus co-implantation for deep-submicron CMOS gate and source/drain engineering
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1909 since deposited on 2021-10-14
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Acq. date: 2026-08-02
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Statistics
Views
1909 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-08-02
Citations