Publication:
The critical need and future directions of SIMS
Date
| dc.contributor.author | van der Heide, Paul | |
| dc.contributor.imecauthor | van der Heide, Paul | |
| dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
| dc.date.accessioned | 2021-10-26T06:39:06Z | |
| dc.date.available | 2021-10-26T06:39:06Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32034 | |
| dc.identifier.url | https://avs.scitation.org/doi/10.1116/1.5008465 | |
| dc.source.beginpage | 03F105 | |
| dc.source.issue | 3 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 36 | |
| dc.title | The critical need and future directions of SIMS | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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