Publication:
Low frequency modulated optical reflectance for the one-dimensional characterization of ultra-shallow junctions
Date
| dc.contributor.author | Dortu, Fabian | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-17T22:00:25Z | |
| dc.date.available | 2021-10-17T22:00:25Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2009-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15245 | |
| dc.title | Low frequency modulated optical reflectance for the one-dimensional characterization of ultra-shallow junctions | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |