Publication:

Local removal frequency of nano particles in megasonic cleaning

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorJanssens, Tom
dc.contributor.authorWostyn, Kurt
dc.contributor.authorArnauts, Sophia
dc.contributor.authorDe Geyter, Annelies
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-16T16:56:10Z
dc.date.available2021-10-16T16:56:10Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12359
dc.source.beginpage353
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
dc.source.conferencedate20/07/2007
dc.source.conferencelocationWashington, DC USA
dc.source.endpage360
dc.title

Local removal frequency of nano particles in megasonic cleaning

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
14808.pdf
Size:
503.69 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions