Publication:

Local removal frequency of nano particles in megasonic cleaning

Date

2007
Proceedings Paper
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cris.virtual.orcid0000-0003-3995-0292
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cris.virtual.orcid0009-0006-5211-6402
cris.virtualsource.departmentcb5e53b9-7316-4010-af61-65451216be66
cris.virtualsource.departmentdd3005c0-8363-45bf-815d-747b553d41da
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cris.virtualsource.orcidd45cb539-5ee0-4d9d-9078-c68fb9e7aa2b
dc.contributor.authorJanssens, Tom
dc.contributor.authorWostyn, Kurt
dc.contributor.authorArnauts, Sophia
dc.contributor.authorDe Geyter, Annelies
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-16T16:56:10Z
dc.date.available2021-10-16T16:56:10Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12359
dc.source.beginpage353
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
dc.source.conferencedate20/07/2007
dc.source.conferencelocationWashington, DC USA
dc.source.endpage360
dc.title

Local removal frequency of nano particles in megasonic cleaning

dc.typeProceedings paper
dspace.entity.typePublication
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