Publication:

SiGe MEMS Technology

Date

2009
Journal article
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cris.virtual.orcid0009-0002-8620-273X
cris.virtual.orcid0009-0005-8734-5646
cris.virtual.orcid0000-0003-3561-3387
cris.virtualsource.departmentf77aef4e-d402-4d8b-b118-16aca5fae8ae
cris.virtualsource.departmentcf84af95-3995-418f-8440-5a31d9b0efcf
cris.virtualsource.department883ef214-e1f4-46c8-acfc-5b5ba2c40884
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cris.virtualsource.orcid883ef214-e1f4-46c8-acfc-5b5ba2c40884
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorHaspeslagh, Luc
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorHaspeslagh, Luc
dc.date.accessioned2021-10-18T05:23:15Z
dc.date.available2021-10-18T05:23:15Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16556
dc.identifier.urlhttp://www.future-fab.com/welcome.asp
dc.source.beginpage30
dc.source.endpage33
dc.source.issue29
dc.source.journalFuture Fab
dc.title

SiGe MEMS Technology

dc.typeJournal article
dspace.entity.typePublication
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