Publication:

Co and Ni-based silicides for sub-45nm CMOS technologies

Date

2005-11
Dissertation
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dc.contributor.authorChamirian, Oxana
dc.contributor.thesisadvisorMaex, Karen
dc.date.accessioned2021-10-16T00:55:22Z
dc.date.available2021-10-16T00:55:22Z
dc.date.embargo9999-12-31
dc.date.issued2005-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10204
dc.title

Co and Ni-based silicides for sub-45nm CMOS technologies

dc.typePHD thesis
dspace.entity.typePublication
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