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Articles
Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
Publication:
Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kambham, Ajay Kumar
;
Kumar, Arul
;
Florakis, Antonios
;
Vandervorst, Wilfried
Journal
Nanotechnology
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1876
since deposited on 2021-10-21
Acq. date: 2025-12-12
Citations
Metrics
Views
1876
since deposited on 2021-10-21
Acq. date: 2025-12-12
Citations