Publication:
Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects
Date
| dc.contributor.author | Carbonell, Laure | |
| dc.contributor.author | Caluwaerts, Rudy | |
| dc.contributor.author | Heylen, Nancy | |
| dc.contributor.author | Volders, Henny | |
| dc.contributor.author | Kellens, Kristof | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Takada, S | |
| dc.contributor.author | Ban, N | |
| dc.contributor.author | Ishimoto, T | |
| dc.contributor.author | Suzuki, N. | |
| dc.contributor.author | Umehara, S. | |
| dc.contributor.imecauthor | Caluwaerts, Rudy | |
| dc.contributor.imecauthor | Heylen, Nancy | |
| dc.contributor.imecauthor | Volders, Henny | |
| dc.contributor.imecauthor | Kellens, Kristof | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-20T10:11:52Z | |
| dc.date.available | 2021-10-20T10:11:52Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20418 | |
| dc.source.beginpage | 1 | |
| dc.source.conference | Hitachi High Technologies CTE Symposium | |
| dc.source.conferencedate | 5/12/2012 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.source.endpage | 1 | |
| dc.title | Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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