Publication:

Materials and technology for RF-MEMS

Date

2004
Proceedings Paper
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dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-15T16:39:20Z
dc.date.available2021-10-15T16:39:20Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9679
dc.source.beginpage76
dc.source.conferenceProceedings of the 5th International Symposium on MEMS and Nanotechnology
dc.source.conferencedate7/06/2004
dc.source.conferencelocationCosta Mesa, CA USA
dc.source.endpage89
dc.title

Materials and technology for RF-MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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