Improved microwave absorption technique for bulk and surface lifetime analysis in processed Si wafers

cris.virtual.department	#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid	0000-0002-5218-4046
cris.virtualsource.department	715a9ada-0798-46d2-a8ca-4775db9a8e46
cris.virtualsource.orcid	715a9ada-0798-46d2-a8ca-4775db9a8e46
dc.contributor.author	Gaubas, Eugenijus
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Claeys, Cor
dc.contributor.author	Poyai, Amporn
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-06T11:12:01Z
dc.date.available	2021-10-06T11:12:01Z
dc.date.embargo	9999-12-31
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3463
dc.source.beginpage	155
dc.source.conference	Proceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST
dc.source.conferencedate	25/09/1999
dc.source.conferencelocation	Höör Sweden
dc.source.endpage	160
dc.title	Improved microwave absorption technique for bulk and surface lifetime analysis in processed Si wafers
dc.type	Proceedings paper
dspace.entity.type	Publication
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