Publication:

Natural EUV mask blank defects: evidence, timely detection, analysis and outlook

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-2211-9443
cris.virtual.orcid0009-0008-6879-2178
cris.virtual.orcid0000-0003-2516-0417
cris.virtual.orcid0000-0003-0803-4267
cris.virtualsource.department386aec34-c796-442e-8812-e827cd030994
cris.virtualsource.department45b3c197-6661-4f60-a2ed-4a867012d28f
cris.virtualsource.department80b06157-bd8a-4926-8696-c8e23bf10e77
cris.virtualsource.department987ea135-86ab-40b5-a86e-f94391ccf5fe
cris.virtualsource.orcid386aec34-c796-442e-8812-e827cd030994
cris.virtualsource.orcid45b3c197-6661-4f60-a2ed-4a867012d28f
cris.virtualsource.orcid80b06157-bd8a-4926-8696-c8e23bf10e77
cris.virtualsource.orcid987ea135-86ab-40b5-a86e-f94391ccf5fe
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorJonckheere, Rik
dc.contributor.authorMagana, John
dc.contributor.authorAbe, Tsukasa
dc.contributor.authorBret, Tristan
dc.contributor.authorHendrickx, Eric
dc.contributor.authorCheng, Shaunee
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-18T22:54:13Z
dc.date.available2021-10-18T22:54:13Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18160
dc.source.beginpage78231T
dc.source.conferencePhotomask Technology 2010
dc.source.conferencedate13/09/2010
dc.source.conferencelocationMonterey, CA USA
dc.title

Natural EUV mask blank defects: evidence, timely detection, analysis and outlook

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
20605.pdf
Size:
865.71 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions