Publication:

Production of dielectric filters with low defect levels for integrated optical devices

Date

2023-03-17
Proceedings Paper
https://doi.org/10.1117/12.2667774
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dc.contributor.authorMingels, Stephan
dc.contributor.authorKutty, Navas
dc.contributor.authorTack, Klaas
dc.contributor.authorBangels, Dries
dc.contributor.authorJanssens, Elias
dc.contributor.authorHagedorn, Harro
dc.contributor.imecauthorBangels, Dries
dc.contributor.imecauthorJanssens, Elias
dc.contributor.imecauthorTack, Klaas
dc.contributor.orcidimecTack, Klaas::0000-0003-0439-9226
dc.date.accessioned2023-12-18T11:32:56Z
dc.date.available2023-08-04T17:07:03Z
dc.date.available2023-08-07T07:21:15Z
dc.date.available2023-12-18T11:32:56Z
dc.date.embargo2023-03-17
dc.date.issued2023-03-17
dc.identifier.doi10.1117/12.2667774
dc.identifier.eisbn978-1-5106-5954-4
dc.identifier.isbn978-1-5106-5953-7
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42258
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 124241J
dc.source.conferenceConference on Integrated Optics - Devices, Materials, and Technologies XXVII
dc.source.conferencedateJAN 30-FEB 02, 2023
dc.source.conferencelocationSan Francisco
dc.source.journalProceedings of SPIE
dc.source.numberofpages6
dc.source.volume12424
dc.title

Production of dielectric filters with low defect levels for integrated optical devices

dc.typeProceedings paper
dspace.entity.typePublication
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