Publication:

Stress techniques and mobility enhancement in FinFET architectures

Date

2012
Meeting abstract
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Author(s)

Eneman, Geert  
;
Witters, Liesbeth  
;
Mitard, Jerome  
;
Hellings, Geert  
;
De Keersgieter, An  
;
Brunco, David
;
Hikavyy, Andriy  
;
Vincent, Benjamin  
;
Simoen, Eddy  
;
Favia, Paola  
;
Bender, Hugo  
;
Veloso, Anabela  
;
Chiarella, Thomas  
;
Boccardi, Guillaume  
;
Kim, Min-Soo  
;
Togo, Mitsuhiro
;
Loo, Roger  
;
De Meyer, Kristin  
;
Horiguchi, Naoto  
;
Collaert, Nadine  
;
Thean, Aaron  

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Abstract

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1852 since deposited on 2021-10-20
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Acq. date: 2026-08-30

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