Publication:

SiGe MEMS technology: a platform technology enabling different demonstrators

Date

2010
Meeting abstract
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Author(s)

Witvrouw, Ann
;
Van Hoof, Rita  
;
Bryce, George  
;
Du Bois, Bert  
;
Verbist, Agnes
;
Severi, Simone  
;
Haspeslagh, Luc  
;
Osman, Haris  
;
De Coster, Jeroen  
;
Wen, Lianggong
;
Puers, Bob  
;
Beernaert, Roel
;
De Smet, Herbert  
;
Rudra, Sukumar
;
Van Thourhout, Dries  

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1909 since deposited on 2021-10-19
Acq. date: 2025-10-24

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1909 since deposited on 2021-10-19
Acq. date: 2025-10-24

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