Publication:

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Date

2021
Journal article
https://doi.org/10.1109/JMEMS.2021.3060182
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-1112-8950
cris.virtual.orcid0000-0002-8245-9442
cris.virtualsource.departmentabd4c200-97e4-4c07-9ea0-e8e329dccb4d
cris.virtualsource.departmentf421472b-3c78-4486-a88e-266fc55314cb
cris.virtualsource.orcidabd4c200-97e4-4c07-9ea0-e8e329dccb4d
cris.virtualsource.orcidf421472b-3c78-4486-a88e-266fc55314cb
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorEdinger, Pierre
dc.contributor.authorVerheyen, Peter
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorBogaerts, Wim
dc.contributor.authorQuack, Niels
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidextTakabayashi, Alain Yuji::0000-0002-1654-6636
dc.contributor.orcidextSattari, Hamed::0000-0002-4792-429X
dc.contributor.orcidextEdinger, Pierre::0000-0002-7339-6662
dc.contributor.orcidextQuack, Niels::0000-0001-5189-0929
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2022-03-04T13:00:36Z
dc.date.available2022-03-04T13:00:36Z
dc.date.issued2021
dc.identifier.doi10.1109/JMEMS.2021.3060182
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39303
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage322
dc.source.endpage329
dc.source.issue2
dc.source.journalJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
dc.source.numberofpages8
dc.source.volume30
dc.title

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

dc.typeJournal article
dspace.entity.typePublication
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