Publication:
XPS study of the cleaning efficiency by ozone processes of protective films formed by reactive ion etching of Co and Ti silicides
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1921 since deposited on 2021-09-30
1last month
Acq. date: 2026-02-26
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Statistics
Views
1921 since deposited on 2021-09-30
1last month
Acq. date: 2026-02-26
Citations