Publication:

Optimized HF solutions in ULSI technology

Date

1996
Meeting abstract
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dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorMertens, Paul
dc.contributor.authorVos, Rita
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T15:31:33Z
dc.date.available2021-09-29T15:31:33Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1528
dc.source.beginpage400
dc.source.conferenceElectrochemical Society 190th Fall Meeting: Symposium on Environmental Aspects of Electrochemical Technology
dc.source.conferencedate6/10/1996
dc.source.conferencelocationSan Antonio, TX USA
dc.title

Optimized HF solutions in ULSI technology

dc.typeMeeting abstract
dspace.entity.typePublication
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