Publication:
Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
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1977 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-09
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1977 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-09
Citations