Publication:
Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
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1979 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-01-07
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Views
1979 since deposited on 2021-10-15
3last month
1last week
Acq. date: 2026-01-07
Citations