Publication:
Generic integration of MEMS with CMOS
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Hermans, Lou | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.date.accessioned | 2021-10-17T11:32:29Z | |
| dc.date.available | 2021-10-17T11:32:29Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 1751-1135 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14599 | |
| dc.source.beginpage | 20 | |
| dc.source.endpage | 22 | |
| dc.source.issue | Spring | |
| dc.source.journal | Semiconductor India | |
| dc.title | Generic integration of MEMS with CMOS | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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