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Implementing cubic-phase HfO2 with $j-value ~ 30 in low-VT replacementgate pMOS devices for improved EOT-Scaling and reliability
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1875 since deposited on 2021-10-20
Acq. date: 2025-10-23
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Views
1875 since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations