Through pitch low-k1 contact hole imaging with CPLTM technology

Publication:

2004

Proceedings Paper

Author(s)

;

;

Fung Chen, J.

;

Hsu, Stephen

;

;

Socha, Robert

;

;

Van Den Broeke, Douglas

1933 since deposited on 2021-10-15

Acq. date: 2026-09-20