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Properties of Pb(Zr0.3Ti0.7)O3 on various bottom electrodes deposited by aqueous chemical solution deposition

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dc.contributor.authorVan Genechten, Dirk
dc.contributor.authorPagnaer, John
dc.contributor.authorGoux, Ludovic
dc.contributor.authorWouters, Dirk
dc.contributor.authorD'Haen, Jan
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorMullens, J.
dc.contributor.authorVan Poucke, L.C.
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-15T17:00:56Z
dc.date.available2021-10-15T17:00:56Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9747
dc.source.conferenceThe 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
dc.title

Properties of Pb(Zr0.3Ti0.7)O3 on various bottom electrodes deposited by aqueous chemical solution deposition

dc.typeOral presentation
dspace.entity.typePublication
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