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On the origin of mobility reduction in ultrathin EOT HK/MG CMOS devices: Impact from gate-stack and device architecture

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1906 since deposited on 2021-10-19
1last month
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Acq. date: 2025-12-08

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1906 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2025-12-08

Citations