Publication:
Influence of UV-cure on low-k properties
Date
| dc.contributor.author | Iacopi, Francesca | |
| dc.date.accessioned | 2021-10-16T02:13:56Z | |
| dc.date.available | 2021-10-16T02:13:56Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10626 | |
| dc.source.conference | Advanced Metallization Conference | |
| dc.source.conferencedate | 27/09/2005 | |
| dc.source.conferencelocation | Colorado Springs, CO USA | |
| dc.title | Influence of UV-cure on low-k properties | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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