Publication:

Mixed organic/inorganic abrasive particles during oxide CMP

Date

2008
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-0578-3422
cris.virtualsource.departmentbb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571
cris.virtualsource.department543f9950-e045-4e77-8292-8ca26808ebf3
cris.virtualsource.orcidbb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571
cris.virtualsource.orcid543f9950-e045-4e77-8292-8ca26808ebf3
dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-17T06:14:06Z
dc.date.available2021-10-17T06:14:06Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13315
dc.source.beginpageH197
dc.source.endpageH201
dc.source.issue7
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume11
dc.title

Mixed organic/inorganic abrasive particles during oxide CMP

dc.typeJournal article
dspace.entity.typePublication
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