Publication:
Zero-level packaging for MEMS or MST devices: the IRS method
Date
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | Van De Peer, Myriam | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | Van De Peer, Myriam | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-14T13:54:39Z | |
| dc.date.available | 2021-10-14T13:54:39Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4795 | |
| dc.source.beginpage | 37 | |
| dc.source.endpage | 39 | |
| dc.source.issue | 6 | |
| dc.source.journal | Advancing Microelectronics | |
| dc.source.volume | 27 | |
| dc.title | Zero-level packaging for MEMS or MST devices: the IRS method | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |