Publication:

Radiation performance of shallow trench isolation

Date

2000
Proceedings Paper
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Author(s)

Claeys, Cor
;
Simoen, Eddy  
;
Poyai, Amporn
;
Hayama, Kiyoteru
;
Kobayashi, K.
;
Ohyama, Hidenori
;
Mohammadzadeh, A.

Journal

na

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1 since deposited on 2021-10-14
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1003 since deposited on 2021-10-14
Acq. date: 2025-10-24

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