Publication:
Investigation of in-use stiction and adhesion in poly-SiGe MEMS
Date
| dc.contributor.author | Ling, Fangzhou | |
| dc.contributor.thesisadvisor | Celis, Jean-Pierre | |
| dc.contributor.thesisadvisor | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-21T09:26:49Z | |
| dc.date.available | 2021-10-21T09:26:49Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2013-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22704 | |
| dc.title | Investigation of in-use stiction and adhesion in poly-SiGe MEMS | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |