Publication:

Recent insights in the physical modeling of the spreading resistance point contact

Date

1995
Proceedings Paper
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dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T13:04:36Z
dc.date.available2021-09-29T13:04:36Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/561
dc.source.beginpage29.1
dc.source.conference3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors
dc.source.conferencedate20/03/1995
dc.source.conferencelocationResearch Triangle Park, NC USA
dc.source.endpage29.2
dc.title

Recent insights in the physical modeling of the spreading resistance point contact

dc.typeProceedings paper
dspace.entity.typePublication
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