Publication:

N7 Logic via patterning using templated DSA - implementation aspects

Date

2015
Presentation
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dc.contributor.authorBekaert, Joost
dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorRyckaert, Julien
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorHer, YoungJun
dc.contributor.authorCao, Yi
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorHer, YoungJun
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-22T18:32:08Z
dc.date.available2021-10-22T18:32:08Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24974
dc.source.conferenceEuropean Mask and Lithography Conference - EMLC
dc.source.conferencedate22/06/2015
dc.source.conferencelocationEindhoven The Netherlands
dc.title

N7 Logic via patterning using templated DSA - implementation aspects

dc.typeOral presentation
dspace.entity.typePublication
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