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Overview of porous dielectric materials for semiconductor applications
Publication:
Overview of porous dielectric materials for semiconductor applications
Date
2008
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Travaly, Youssef
;
Eslava Fernandez, Salvador
Journal
Abstract
Description
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1912
since deposited on 2021-10-17
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1912
since deposited on 2021-10-17
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations