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Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Publication:
Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Date
1996
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Trenkler, Thomas
;
Clarysse, Trudo
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Snauwaert, J.J.
;
Hellemans, L.
Journal
Scanning Microscopy
Abstract
Description
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Views
1891
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1891
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations