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Airgaps for interconnects: Ready to go?
Publication:
Airgaps for interconnects: Ready to go?
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beyer, Gerald
;
Pantouvaki, Marianna
;
Tokei, Zsolt
Journal
Solid State Technology
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1835
since deposited on 2021-10-18
Acq. date: 2025-12-16
Citations
Metrics
Views
1835
since deposited on 2021-10-18
Acq. date: 2025-12-16
Citations