Publication:
MEMS reliability. Stiction, charging, and RF MEMS
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.thesisadvisor | Puers, Bob | |
| dc.contributor.thesisadvisor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-15T17:14:13Z | |
| dc.date.available | 2021-10-15T17:14:13Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2004-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9791 | |
| dc.title | MEMS reliability. Stiction, charging, and RF MEMS | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |