Publication:

Characterization of different tip materials for SCM

Date

2003
Meeting abstract
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dc.contributor.authorDuhayon, Natasja
dc.contributor.authorFouchier, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-15T04:35:41Z
dc.date.available2021-10-15T04:35:41Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7536
dc.source.beginpage213
dc.source.conferenceUltra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.
dc.source.conferencedate27/04/2003
dc.source.conferencelocationSanta Cruz, CA USA
dc.title

Characterization of different tip materials for SCM

dc.typeMeeting abstract
dspace.entity.typePublication
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