Publication:
Degradation and breakdown in thin oxide layers: mechanisms, models and reliability prediction
Date
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.date.accessioned | 2021-10-06T11:00:47Z | |
| dc.date.available | 2021-10-06T11:00:47Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3395 | |
| dc.source.beginpage | 1445 | |
| dc.source.endpage | 1460 | |
| dc.source.issue | 10 | |
| dc.source.journal | Microelectronics and Reliability | |
| dc.source.volume | 39 | |
| dc.title | Degradation and breakdown in thin oxide layers: mechanisms, models and reliability prediction | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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