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Highly chemical reactive ion etching of gallium nitride
Publication:
Highly chemical reactive ion etching of gallium nitride
Date
2000
Proceedings Paper
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20175.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Karouta, F.
;
Jacobs, B.
;
Moerman, I.
;
Jacobs, K.
;
Weyher, J.L.
;
Porowski, S.
;
Crane, R.
;
Hageman, P.R.
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1932
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1932
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-08
Citations