Publication:
Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan system
Date
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Kocsis, Michael | |
| dc.contributor.author | Bruls, R. | |
| dc.contributor.author | Van Peski, C. | |
| dc.contributor.author | Grenville, A. | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.imecauthor | Kocsis, Michael | |
| dc.date.accessioned | 2021-10-15T13:00:32Z | |
| dc.date.available | 2021-10-15T13:00:32Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8751 | |
| dc.source.beginpage | 239 | |
| dc.source.endpage | 262 | |
| dc.source.issue | 2 | |
| dc.source.journal | Journal of Microlithography, Microfabrication and Microsystems | |
| dc.source.volume | 3 | |
| dc.title | Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan system | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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