Publication:

Etching of Co-Pd with significantly reduced sidewall re-deposition

Date

2013

Meeting abstract

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Author(s)

;

Nishimura, Eiichi

;

Kushibiki, Masato

;

Wataru, Shimizu

;

Tahara, Shigeru

;

;

;

Boullart, Werner

Statistics

1941 since deposited on 2021-10-21

3last month

Acq. date: 2026-05-19